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Author      Title/Abstract      

Wastewater Management in Semiconducting Electronic Crystal Manufacturing Facilities
Author: Joseph M. Wong
Date: 5/187
Presented at the 42nd Annual Purdue Industrial Waste Conference, May 12-14, 1987

The last 15 to 20 years have seen a rapid evolution of electronic technology. The semiconducting electronic crystals industry is growing in the United States as well as in other parts of the world. A major part of that evolution has been the development of single crystals with unique structural and electronic properties. These crystals are essential parts of most microelectronic devices. The manufacturing processes require large quantities of chemicals and water for etching and cleaning. Consequently, wastewater from these plants may require extensive treatment before discharge. Figure 1 shows the basic manufacturing processes for semiconducting electronic crystals and som e of the wastes produced. (1)